Hsu, T. -. R. MEMS & Microsystems: Design and manufacture,1ed. McGraw Hill.
Chicago Style (17th ed.) CitationHsu, Tai - Ran. MEMS & Microsystems: Design and Manufacture,1ed. McGraw Hill.
MLA (8th ed.) CitationHsu, Tai - Ran. MEMS & Microsystems: Design and Manufacture,1ed. McGraw Hill.
Warning: These citations may not always be 100% accurate.