Kim, E. b. T. S. t. b. H. Applications of plasma processes to VLSI technology. John Wiley and Sons.
Dyfyniad Arddull ChicagoKim, Edited by Takuo Sugano translated by Hyo-Gun. Applications of Plasma Processes to VLSI Technology. John Wiley and Sons.
Dyfyniad MLAKim, Edited by Takuo Sugano translated by Hyo-Gun. Applications of Plasma Processes to VLSI Technology. John Wiley and Sons.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.