Nanoscale calibration standards and methods: dimensional and related measurements in the micro and nanometer range
st,1/irh,c.1
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| Main Author: | |
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| Format: | Sirkulasi |
| Language: | Inggris |
| Published: |
Wiley-VCH
2005
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| Subjects: | |
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| Summary: | st,1/irh,c.1 |
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| Physical Description: | xxii, 519; 23 |
| ISBN: | ISBN:3-527-40502-X |